APCOT2024 Programme Booklet

23 rd to 26 th June 2024 | Singapore

APCOT 2024 The 11th Asia-Paci c Conference of Transducers and Micro-Nano Technology

Programme Booklet

WELCOME MESSAGE

It is our pleasure to welcome you to the 11th Asia-Paci c Conference of Transducers and Micro-Nano Technology (APCOT 2024). APCOT is a premier biannual event with over two decades of history. The ten previous editions have toured various regions, including China, Japan, Hong Kong, Taiwan, Australia, South Korea, and even Singapore. This edition has once again returned to Singapore and is being held at the National University of Singapore from the 23rd to 26th June 2024. Conveniently situated on the southernmost tip of continental Asia, our sunny island of Singapore is a bustling metropolis and a well-connected global hub. APCOT 2024 aims to be a platform for leading researchers to congregate and discuss their recent advances in transducers and micro and nanotechnology. This year, we have received close to 200 abstract submissions. Of these submissions, 9 4 have been selected for oral presentation and 84 for poster presentation. Additionally, we have an impressive lineup of 3 plenary speakers, 2 3 keynote speakers, and 57 invited speakers. We would like to express our sincerest appreciation to all authors and presenters for contributing their high-quality works.

Lastly, we would also like to express our gratitude to the committee members, event planner, and other student volunteers that have helped make this conference a success.

CONFERENCE CO-CHAIR GUANGYA ZHOU

CONFERENCE CO-CHAIR CHENGKUO LEE

TECHNICAL PROGRAMME CO-CHAIR TOSHIYUKI TSUCHIYA

TECHNICAL PROGRAMME CO-CHAIR MICHINAO HASHIMOTO

01

CONFERENCE COMMI TTEE

APCOT 2024 GENERAL CO-CHAIRS Guangya Zhou Chengkuo Lee

National University of Singapore, Singapore National University of Singapore, Singapore

APCOT 2024 TECHNICAL PROGRAMME CO-CHAIRS Toshiyuki Tsuchiyua Michinao Hashimoto Kyoto University, Japan

Singapore University of Technology and Design, Singapore

APCOT 2024 TECHNICAL PROGRAMME COMMITTEE

Ki Ando Takahiro Arakawa Chang-Wook Baek Enakshi Bhattacharya Honglong Chang Yi Chiu Dukhyun Choi Cheng-Hsin Chuang Hiroyuki Fujita Yoshihiro Hasegawa Michinao Hashimoto Akio Higo Qing-An Huang Makoto Ishida Yonggang Jiang Tesuo Kan

Chiba Institute of Technology, Japan Tokyo University of Technology, Japan Chung-Ang University, Korea

Indian Institute of Technology Madras, India Northwestern Polytechnical University, China National Yang Ming Chiao Tung University, Taiwan Sungkyunkwan University, Korea National Sun Yat-sen University, Taiwan The University of Tokyo, Japan Hiroshima City University, Japan Singapore University of Technology and Design, Singapore The University of Tokyo, Japan Southeast University, China Toyohashi University of Technology, Japan Beihang University, China The University of Electro-Communications, Japan University of Western Australia, Australia Daegu Gyeongbuk Institute of Science & Technology, Korea Kyungpook National University, Korea Ritsumeikan University, Japan Meiji University, Japan Daegu Gyeongbuk Institute of Science & Technology, Korea National University of Singapore, Singapore Hong Kong University of Science & Technology, Hong Kong Chang Gung University, Taiwan National Tsing Hua University, Taiwan SIMIT, Chinese Academy of Science, China National Taiwan University, Taiwan Shandong University, China National Sun Yat-sen University, Taiwan

Adrian Keating Hoe Joon Kim Seong Ho Kong Satoshi Konishi Hiroyuki Kudo Sanghoon Lee Chengkuo Lee Yi-Kuen Lee Kin Fong Lei Sheng-Shian Li Tie Li Wei-Chang Li Yang Li Che-Hsin Lin Chih-Ting Lin Zong-Hong Lin Yufei Liu Moeto Nagai Ilkwon Oh Takahito Ono Takeshi Onodera

National Taiwan University, Taiwan National Taiwan University, Taiwan Chongqing University, China Toyohashi University of Technology, Japan KAIST, Korea

Tohoku University, Japan Kyushu University, Japan

(continued...)

02

CONFERENCE COMMITTEE

APCOT 2024

APCOT 2024 TECHNICAL PROGRAMME COMMITTEE

Keio University, Japan Korea University, Korea Chulalongkorn University, Thailand King Mongkut’s Institute of Technology, Thailand University of Sydney, Australia Toyohashi University of Technology, Japan Niigata University, Japan Chuo University, Japan Chulalongkorn University, Thailand

Hiroaki Onoe James Jungho Pak Alongkorn Pimpin Wibool Piyawattanametha Niels Quack Kazuaki Sawada Masayuki Sohgawa Hiroaki Suzuki Boonchai Techaumnat Toshiyuki Tsuchiya Takashiro Tsukamoto Fei Wang Junbo Wang Wei Wang Yuelin Wang Zenghui Wang Xueyong Wei Aron Michael Woldeghiorgis

Kyoto University, Japan Tohoku University, Japan

Southern University of Science and Technology, China Aerospace Information Research Inst., CAS, China Peking University, China SIMIT, Chinese Academy of Sciences, China University of Electronic Science and Technology of China, China Xi’an Jiaotong University, China University of New South Wales, Australia Multimedia University, Malaysia Wuhan University, China ShanghaiTech University, China IE, Chinese Academy of Sciences, China Ritsumeikan University, Japan Shanghai Jiao Tong University, China Monash University, Australia University of Electronic Science and Technology of China, China National University of Singapore, Singapore Southeast University, China

Hin-Yong Wong Guoqiang Wu Tao Wu Shan-Hong Xia Daisuke Yamane Zhouqing Yang Mehmet Yuce Xiaosheng Zhang Guangya Zhou Zai-Fa Zhou

APCOT 2024 LOCAL ORGANISING COMMITTEE Jinghua Teng (Chair) Changsheng Wu Xianshu Luo Huajun Liu Yao Zhu Sunmi Shin Holden Li

Institute of Materials Research and Engineering (IMRE), A*STAR, Singapore National University of Singapore, Singapore Institute of Microelectronics, A*STAR, Singapore Institute of Materials Research and Engineering (IMRE), ASTAR, Singapore

Institute of Microelectronics, A*STAR, Singapore National University of Singapore, Singapore Nanyang Technological University, Singapore

APCOT 2024 AWARD COMMITTEE Yi-Kuen Lee (Chair)

Hong Kong University of Science & Technology, Hong Kong National Yang Ming Chiao Tung University, Taiwan Shandong University, China Keio University, Japan Hong Kong Polytechnic University, Hong Kong Southeast University, China

Yi Chiu Yang Li

Hiroaki Onoe Xuming Zhang Zai-Fa Zhou

(continued...)

03

CONFERENCE COMMITTEE

APCOT 2024

APCOT INTERNATIONAL STEERING COMMITTEE

SIMIT, Chinese Academy of Science, China Chung-Ang University, Korea Indian Institute of Technology Madras, India National Yang Ming Chiao Tung University, Taiwan The University of Tokyo, Japan Southeast University, China Toyohashi University of Technology, Japan University of Western Australia, Australia Kyungpook National University, Korea Ritsumeikan University, Japan Hong Kong University of Science & Technology, Hong Kong National Tsing Hua University, Taiwan

Tie Li (Chair) Chang-Wook Baek Enakshi Bhattacharya Yi Chiu Hiroyuki Fujita Qing-An Huang

Makoto Ishida Adrian Keating Seong Ho Kong Satoshi Konishi Yi-Kuen Lee Sheng-Shian Li Takahito Ono

Tohoku University, Japan Korea University, Korea Toyohashi University of Technology, Japan Chulalongkorn University, Thailand SIMIT, Chinese Academy of Sciences, China University of New South Wales, Australia IE, Chinese Academy of Sciences, China National University of Singapore, Singapore Southeast University, China

James Jungho Pak Kazuaki Sawada Boonchai Techaumnat Yuelin Wang Aron Michael Woldeghiorgis

Shan-Hong Xia Guangya Zhou Zai-Fa Zhou

APCOT EX-OFFICIALS & ADVISORY BOARD MEMBERS Sundarrajan Asokan Ching-Hsiang Cheng Weileun Fang I-Yu Huang Indian Institute of Science, India Wuhan University of Technology, China National Tsinghua University, Taiwan National Sun Yat-sen University, Taiwan Yonsei University, Korea

Yong-Jun Kim Chengkuo Lee Yu-Cheng Lin Ai-Qun Liu Alongkorn Pimpin Jang-Koo Shin Mana Sriyudthsak Anurat Wisitsoraat Ning Xi

National University of Singapore, Singapore National Cheng Kung University, Taiwan Nanyang Technological University, Singapore

Chulalongkorn University, Thailand Kyungpook National University, Korea Chulalongkorn University, Thailand National Electronics and Computer Technology Center, Thailand City University of Hong Kong, Hong Kong

04

CONTENT

PAGE NO.

CONTENT INFORMATION.

01 02 06 07 08 09 10 11 12 13 14 15 18 20 22 24 26 28 29 30

Welcome Message Conference Committee General Information UTown Map Town Plaza Floor Map Social Event

Awards of ACPOT 2024 Presentation Guidelines APCOT 2024 Special Issues

Programme Overview Programme (23 June) Programme (24 June) Programme (25 June) Programme (26 June) Poster Session Group A Poster Session Group B Poster Session Group C Acknowledgement

Advertisement APCOT2026

05

GENERAL INFORMATION

Additional Information

Conference Venue

Breaks All scheduled breaks will be held at Foyer.

APCOT 2024 is held at UTown in the National University of Singapore.

Name Badges All attendees must wear their name badges at all times to gain admission to all sessions, exhibits, lunches and receptions. Wireless Internet Service Free Wi-Fi connection for NUS guests. Connect to “NUS Guest” wireless network, register your mobile number online and enter the OTP (One Time Password) to start accessing the free Wi-Fi.

2 College Ave West, Stephen Riady Centre Singapore 138607

The oral sessions are held in the following venues at Town Plaza in UTown:

UTown Auditorium 1 (Level 1) Seminar Room 1 (Level 2) Seminar Room 3 (Level 2) Seminar Room 7 (Level 2) Global Learning Room (Level 2) Held in the area outside the Town Plaza Level 2 seminar rooms.

Plenary Sessions Breakout Sessions

For APCOT 2024 Wi-Fi Connect to “NUS_Guest” Select “Event Login” Enter the pin “8UKA3M”

Poster Session

Cellular Phones and Alarms As a courtesy to our speakers and other attendees, please put all devices on silent mode. Video Recording Video recording is prohibited in the sessions, poster presentations and exhibition areas.

Level 2 Foyer Level 2 Foyer

Exhibition

Welcome Reception

Banquet Dinner

Shangri-La Rasa Sentosa, Singapore Horizon Pavilion, Level 5 101 Siloso Road Sentosa, Singapore 098970

Registration The registration counter is situated at the Foyer outside UTown Auditorium 1 and open at the following times:

23 June (Sun) 15:00 to 18:00

24 June (Mon) 08:00 to 18:00

25 June (Tue) 08:00 to 14:00

26 June (Wed) 08:00 to 16:00

Date: Time:

Shuttle service from Park Avenue Rochester Hotel Guests with accommodation at Park Avenue Rochester Hotel can take the shuttle bus from the hotel to UTown daily. Please gather at the hotel lobby 10 minutes before the shuttle departure time. A marshal will be at the hotel lobby with the event signage. Park Avenue Rochester Hotel to UTown Date: Departure Time From: 23 June (Sun) 17:00 24 June (Mon) 07:50 25 June (Tue) 08:00 26 June (Wed) 08:00

Social Activities

S.E.A. Aquarium 8 Sentosa Gateway, Sentosa Island, Singapore 098269 (A bus service is available to take participants from UTown to Resort World Coach Bay which is within walking distance to the entrance of the SEA Aquarium)

Singapore Cable Car 100 Mount Faber Road, Faber Peak, Singapore 099203 (A bus service is available to take participants from UTown to Mount Faber Station)

25 June 2024, Tuesday 15:00 - 18:00

06

UTOWN MAP

* MAP IS SIMPLIFIED AND NOT DRAWN TO SCALE

07

TOWN PLAZA FLOOR MAP

STEPHEN RIADY CENTRE •

FOOD COURT (FLAVORS@UTOWN)

• •

OTHER FOOD OPTIONS

BUS BAY

TO SRC

EDUCATION RESOURCE CENTRE •

EXIT

LEVEL 1

REGISTRATION

STARBUCKS

TO ERC

EXIT

1

AUDITORIUM 1

2

RETAIL & DINING

EXIT

LEVEL 2

• •

OTHER FOOD OPTIONS BUS STOP FOR NUS INTERNAL SHUTTLE BUS

RETAIL & DINING

SEMINAR ROOM 3

RETAIL & DINING

3

SEMINAR ROOM 1

RETAIL & DINING

POSTER SESSIONS WELCOME RECEPTION LUNCH & TEA BREAKS

4

7

INFORMAL STUDY

5

SEMINAR ROOM 7

6

EXIT

GLOBAL LEARNING ROOM

* MAP IS SIMPLIFIED AND NOT DRAWN TO SCALE

08

SOCIAL EVENT

S.E.A. AQUARIUM S.E.A. Aquarium is located on the sunny island of Sentosa. Its highlight include more than 100,000 individual animals belonging to over 800 species. Please note that the S.E.A. Aquarium closes at 17:00.

SOCIAL EVENT & CONFERENCE BANQUET

SINGAPORE CABLE CAR The Singapore Cable Car is located on Mount Faber. Mount Faber is a hill that with an elevation of 160 m; nevertheless, it offers a panoramic view of the central business district. After exploring Mount Faber, guests can ride the Singapore Cable Car to Sentosa. As June is one of the hottest months in Singapore, guests are recommended to dress down for the excursion. Guests are also strongly encouraged to bring along ample water, sunblock, and an umbrella. An excursion is arranged for the afternoon of 25 June 2024 (Tuesday), followed by the conference banquet in the evening. Guests are to assemble outside UTown Auditorium 1 by 14:15 to take the shuttle bus to their respective excursion venues. Tickets to the excursion venue will be distributed based on the guests’ preselection. The two excursion venues are the Singapore Cable Car and the S.E.A. Aquarium.

Immerse yourself in the marine wonderland

OTHER ATTRACTIONS IN SENTOSA Apart from the Singapore Cable Car and the S.E.A. Aquarium, there is more fun to be had in Sentosa before the conference banquet. Some free attractions are listed below, including Siloso Beach, Sentosa Sensoryscape, Sentosa Nature Discovery, Fort Siloso and Fort Siloso Skywalk.

Siloso Beach and a view of Shangri-La Rasa Sentosa from Siloso Beach.

Sights from Mount Faber and the Singapore Cable Car headed to Sentosa.

After disembarking at Sentosa, passengers can then use their Sentosa Line return pass and hop off at any of the stops along the Sentosa Line. Tickets for the Sentosa Line only allow visitors to stop once at each station. Siloso Point station is a short walk away from the conference banquet venue.

Views from Fort Siloso Skywalk.

CONFERENCE BANQUET The conference banquet is held at the Horizon Pavilion in Shangri-La Rasa Sentosa. Guests are expected to make their own way to the banquet venue after the excursion. Please arrive by 18:30. By transport, Shangri-La Rasa Sentosa is nearest to Siloso Point station, which is serviced by the Sentosa Line cable car, Sentosa Bus A, and the Sentosa Beach Tram.

Cable car route map

MOUNT FABER

SENTOSA

MOUNT FABER LINE

3-5 MIN WALK

HARBOURFRONT

SENTOSA LINE

MERLION IMBIAH

SILOSO POINT

LOOKOUT

09

AWARDS FOR APCOT 2024

THE PROFESSOR WEN KO'S BEST PAPER AWARD

The Professor Wen Ko’s Best Paper Award was created in memory of Professor Wen Hsiung Ko (葛文勋教授) , a MEMS Pioneer, who started the rst APCOT Conference in 2002.

THE IEEJ-E APCOT BEST PAPER AWARD

The IEEJ-E APCOT Best Paper Award was established by the Technical Society E, the Institute of Electrical Engineers of Japan (IEEJ-E) to acknowledge and honour the excellent papers presented by members of IEEJ-E at APCOT conferences. The IEEJ-E APCOT Best Paper Award Committee will select the winners based on the quality of their papers and presentations.

BEST STUDENT ORAL PRESENTATION AND POSTER PRESENTATION AWARDS

The Best Student Oral Presentation and Poster Presentation Awards aims to encourage students to continue their pursuit of high-quality research work. This year’s award is sponsored by Multidisciplinary Digital Publishing Institute (MDPI).

10

PRESENTATION GUIDELINES

ORAL SESSION GUIDE The following equipment are provided in each oral presentation venue:

1. Windows-based laptop 2. Projector (HDMI) and projector screen 3. Podium microphone 4. Clicker cum laser pointer

Presenters who prefer using their personal laptops should bring along the necessary display adapters. To avoid font issues, it is best to save your PowerPoint or PDF presentation with all fonts embedded. All slides are to be in 16:9 format. For slides that have not been previously submitted to the event secretariat, presenters are required to bring their presentation les in their personal USB ash drives to the presenter’s desk upon arrival. Plenary, keynote, invited, and general speakers are allocated 45, 30, 20 and 15 minutes, respectively for their presentation (including Q&A if time permits). A “3 mins” card will be ashed if the presenter has 3 minutes left, and an “X” card will be ashed when the time is up.

POSTER SESSION GUIDE

There are three poster sessions in this year’s conference, and they are held outside the Town Plaza Level 2 seminar rooms (refer to Town Plaza oor map). Posters are to be designed and printed in A1 size (594 mm in width × 841 mm in height). There is no printing service available at the conference venue. Presenters are to be with their posters for the entirety of their designated session. For each poster session, the set up and take down times are as follows:

Set up time Group A (24 June 2024, Monday): 10:00 Group B (25 June 2024, Tuesday): 10:00 Group C (26 June 2024, Wednesday): 10:00

Take down time Group A (24 June 2024, Monday): 18:00 Group B (25 June 2024, Tuesday): 09:00 next day (26 June 2024, Wednesday) Group C (26 June 2024, Wednesday): 17:00

11

SPECIAL ISSUES APCOT 2024

APCOT 2024 SPECIAL ISSUES

Authors of accepted abstracts are encouraged to submit the full-length paper for publication consideration for the APCOT2024 Special Issue in the following notable international journals:

MDPI ACTUATORS (IMPACT FACTOR:2.6) https://www.mdpi.com/journal/actuators/special_issues/951V1783UD MDPI SENSORS (IMPACT FACTOR: 3.9) https://www.mdpi.com/journal/sensors/special_issues/KI7530P3ZP BIOMICROFLUIDICS AIP PUBLISHING

https://pubs.aip.org/aip/bmf SENSORS AND MATERIALS https://rebrand.ly/APCOT24-Sensors-and-Materials MDPI MICROMACHINES https://rebrand.ly/mdpi-micromachines IOP JMM https://iopscience.iop.org/journal/0960-1317

12

PROGRAMME OVERVI EW

SUNDAY, 23 JUNE 2024 15:00 – 18:00 18:00 – 20:00

Conference Registration Welcome Reception

Outside UTown Auditorium 1 Outside Seminar Rooms

MONDAY, 24 JUNE 2024

Opening Address Plenary Talk 1: Shuji TANAKA, Tohoku University A1: Micro/Nano uidics, 3D P rinting and B ioprinting I B1: Wearable D evices & Fl exible E lectronics

08:45 – 09:00 09:00 – 10:00 10:00 – 11:00

UTown Auditorium 1 UTown Auditorium 1 UTown Auditorium 1 Seminar Room 1 Seminar Room 3 Seminar Room 7 Global Learning Room Outside Seminar Rooms UTown Auditorium 1 Seminar Room 1 Seminar Room 3 Seminar Room 7 Global Learning Room UTown Auditorium 1 Seminar Room 1 Seminar Room 3 Seminar Room 7 Global Learning Room Outside Seminar Rooms Outside Seminar Rooms UTown Auditorium 1 Seminar Room 1 Seminar Room 3 Seminar Room 7 Global Learning Room UTown Auditorium 1 UTown Auditorium 1 Seminar Room 1 Seminar Room 3 Seminar Room 7 Global Learning Room Outside Seminar Rooms UTown Auditorium 1 Seminar Room 1 Seminar Room 3 Seminar Room 7 Global Learning Room Outside Seminar Rooms Singapore Cable Car / S.E.A. Aquarium

C1: MEMS & NEMS I D1: Physical S ensors I E1: Micro- O ptics & N anophotonics I

11:00 – 11:15 11:15 – 12:45

Tea Break

Lunch F2: Biological S ensors & B iomedical D evices II E3: Micro- O ptics & N anophotonics III A2: Micro/Nano uidics, 3D P rinting and B ioprinting II C2: MEMS & NEMS II G2: Piezoelectric T ransducers, RF & A coustics II F1: Biological S ensors & B iomedical D evices I G1: Piezoelectric T ransducers, RF & A coustics I J: Student award for O ral P resentation H1: Micro/Nanofabrication, M aterials & P ackaging I E2: Micro- O ptics & N anophotonics II Tea Break Poster Session 1, Group A F3: Biological S ensors & B iomedical D evices II I I1: Chemical S ensors I B2: Wearable D evices & Fl exible E lectronics II

12:45 – 14:00 14:00 – 15:30

15:30 – 15:45 15:45 – 16:45 16:45 – 18:15

C3: MEMS & NEMS III D2: Physical S ensors II

TUESDAY, 25 JUNE 2024 08:45 – 09:45 09:45 – 10:45

Plenary Talk 2: Liwei LIN, University of California, Berkeley G3: Piezoelectric T ransducers, RF & A coustics III B3: Wearable D evices & Fl exible E lectronics III C4: MEMS & NEMS IV A3: Micro/Nano uidics, 3D P rinting and B ioprinting III F4: Biological S ensors & B iomedical D evices IV

10:45 – 11:00 11:00 – 12:15

Tea Break

G4: Piezoelectric T ransducers, RF & A coustics IV I2: Chemical S ensors II C5: MEMS & NEMS V D3: Physical S ensors III F5: Biological S ensors & B iomedical D evices V

Lunch Poster Session 2, Group B Shuttle bus to Singapore Cable Car / S.E.A. Aquarium (Assemble outside UTown Auditorium by 14:15) Social Event (Guests to make their own way to banquet venue by 18:30) Conference Banquet

12:15 – 13:15 13:15 – 14:15 14:15 – 15:00

15:00 – 18:30

Horizon Pavilion, Shangri-La Rasa Sentosa

18:30 – 21:00

13

PROGRAMME OVERVIEW

APCOT 2024

WEDNESDAY, 26 JUNE 2024 08:45 – 09:45 09:45 – 11:00

Plenary Talk 3: Xiaogang Liu, National University of Singapore G5: Piezoelectric T ransducers, RF & A coustics V F6: Biological S ensors & B iomedical D evices VI B4: Wearable D evices & Fl exible E lectronics IV C6: MEMS & NEMS VI G6: Piezoelectric T ransducers, RF & A coustics VI A4: Micro/Nano uidics, 3D P rinting and B ioprinting IV E4: Micro-optics & N anophotonics IV H2: Micro/Nanofabrication, M aterials & P ackaging II Lunch Poster Session 3, Group C A5: Micro/Nano uidics, 3D P rinting and B ioprinting V F7: Biological S ensors & B iomedical D evices VII Tea Break

UTown Auditorium 1 UTown Auditorium 1 Seminar Room 1 Seminar Room 3 Global Learning Room Outside Seminar Rooms UTown Auditorium 1 Seminar Room 1 Seminar Room 3 Global Learning Room Outside Seminar Rooms UTown Auditorium 1 Seminar Room 1 Seminar Room 3 Global Learning Room UTown Auditorium 1

11:00 – 11:15 11:15 – 12:45

12:45 – 13:45 13:45 – 14:45 14:45 – 16:30

D4: Physical S ensors IV C7: MEMS & NEMS VII

16:30 – 16:45

Closing Address

PROGRAMME 23RD JUNE (SUN)

TIME

PROGRAMME

12:15 - 13:15 15:00 – 18:00

Lunch Break Conference registration (Outside UTown Auditorium 1)

18:00 – 20:00

Welcome reception (Outside Town Plaza Level 2 seminar rooms)

14

PROGRAMME 24TH JUNE 2024 (MON)

TIME

PROGRAMME

UTown Auditorium 1 Conference Chair: Guangya ZHOU Opening Address Session Chair: Chengkuo LEE Plenary Speaker, Piezo Device 2.0 Shuji TANAKA, Department of Robotics, Tohoku University

08:45 - 09:00

09:00 - 10:00

Oral Session 1

Micro/Nano uidics, 3D Printing and Bioprinting I

Wearable Devices & Flexible Electronics I

MEMS & NEMS I

Physical Sensors I

Micro-Optics & Nanophotonics I

UTown Auditorium 1

Seminar Room 1

Seminar Room 3

Seminar Room 7

Global Learning Room

Session Chair: Michinao HASHIMOTO

Session Chair: Inkyu PARK

Session Chair: Zai-Fa ZHOU

Session Chair: Aron Michael WOLDEGHIORGIS

Session Chair: Guangya ZHOU

Keynote (30 mins) Accelerating Innovation in Microsystems with Precision 3D Printing Nicholas Xuanlai FANG Department of Mechanical Engineering, The University of Hong Kong Keynote (30 mins) Micro uidic Platform for Continuous Synthesis of Glucose from CO2 Xuming ZHANG Department of Applied Physics, The Hong Kong Polytechnic University

Keynote (30 mins) Skin-Integrated Haptic Interfaces for VR/AR Applications Xinge YU Department of Biomedical Engineering, College of Engineering, The Chinese University of Hong Kong Nanocomposites for Enhanced Sensitivity and Sensing Range Jongbaeg KIM Department of Mechanical Engineering, College of Engineering, Yonsei University Keynote (30 mins) Flexible Tactile Sensors Based on Microstructured

OR-01-0047 (Student award nominee) Dual-Frequency Notch Filter Using Helmholtz Resonator Array with Bistable Structure Masahiro FUKUTA Department of Mechanical Engineering, Faculty of Science and Technology, Keio University OR-09-0145 (Student award nominee) Tunable Bistability and Chaos in a Double-Well Microelectromechanical Resonator Junhui WU National University of Singapore Keynote (30 mins) MEMS/NEMS Switches for Low-Power Radiation-Hard Non-Volatile Memory and Logic Applications Jun-Bo YOON Department of Electrical Engineering, Korea Advanced Institute of Science & Technology (KAIST)

Invited (20 mins) Synchronization Enhanced Sensing Technology – from Natural Phenomena to Engineering Application Xueyong WEI Xi’an Jiao Tong University

Invited (20 mins) Non-Invasive Phase Pre-Calibration and Management in Programmable Photonic Integrated Circuits Ming-Chang M. LEE National Tsing Hua University

Invited (20 mins) Solar Blind Deep UV

Invited (20 mins) Ultrafast Structural Dynamics and Nonlinear Optical Properties of Topological Polar

10:00 - 11:00 11:15 - 12:45

Avalanche Photodetector Based on a β -Ga2O3/ Si Heterojunction Bingsheng LI Northeastern Normal University Invited (20 mins) Light Wavelength Detection Method and Application of the Filter-Free Wavelength Sensor Yong-Joon CHOI Toyohashi University of Technology

Phases Qian LI Tsinghua University

Invited (20 mins) Planar Super-Oscillation Lenses (SOLs): Design, Fabrication and Applications Yiting YU Northwestern Polytechnical University

Tea Break (11:00-11:15) Oral Session 2

Biological Sensors & Biomedical Devices I

Piezoelectric Transducers, RF & Acoustics I

Student Award for Oral Presentation

Micro/Nanofabrication, Materials & Packaging I

Micro-Optics & Nanophotonics II

UTown Auditorium 1

Seminar Room 1

Seminar Room 3

Seminar Room 7

Global Learning Room

Session Chair: Xuming ZHANG

Session Chair: Chen LIU

Session Chair: Yi-Kuen LEE

Invited (20 mins) Unconventional Session Chair: Sunmi SHIN

Session Chair: Mariusz MARTYNIUK

Keynote (30 mins) Emergent Functions of Electrically-Induced Bubbles Yoko YAMANISHI Department of Mechanical Engineering, Kyushu University Keynote (30 mins) Flexible and Biocompatible Piezoelectric Biomaterials and Nanogenerator Devices Xudong WANG Department of Materials Science and Engineering, College of Engineering, University of Wisconsin–Madison

Keynote (30 mins) mm-Wave Acoustic Resonators Gianluca PIAZZA Department of Electrical and Computer Engineering, Carnegie Mellon University

OR-03-0158 (Student award nominee) Mechanically and Optically Unobtrusive Plant E-Skin for Monitoring Plants Yanqin YANG National University of Singapore Technique to 3-Dimensional Surface and its Application: Surface Enhanced Raman Scattering Byung-Ho KANG Korea Advanced Institute of Science and Technology (KAIST) OR-02-0168-R (Student award nominee) Water- oated Nanostructure as an Innovative Nano Transfer

Invited (20 mins) 3D Photonic Nanostructures for Enhanced Biosensing and Environmental Monitoring Faheng ZANG Shanghai Jiao Tong University

High-Temperature Annealing Based Micro-/Nanofabrication Jungchul LEE Korean Advanced Institute of Science and Technology (KAIST)

Invited (20 mins) Sputtered AlScN Thin Films for Piezoelectric Applications Minghua LI Institute of Microelectronics (IME), Agency for Science, Technology and Research (A*STAR)

OR-01-0111 MEMS Processing Simulation with Physical Model Based Input Parameter Jiyang LIU Key Laboratory of MEMS of

Invited (20 mins) Ultra-Sensitive Opto-Mechanical Ultrasound Sensor On The Tiny Silicon Photonic MEMS Platform Jaesok YU Daegu Gyeongbuk Institute of Science and Technology (DGIST)

Ministry of Education, Southeast University

(continued...)

15

PROGRAMME

24TH JUNE 2024 (MON) DAY 1

TIME PROGRAMME

Invited (20 mins) Piezoelectric Silicon-on-Nothing Process: Versatile Process Platform for MEMS Acoustic Devices Yul KOH Institute of Microelectronics (IME), Agency for Science, Technology and Research (A*STAR) Invited (20 mins) Next Generation Piezoelectric Thin Films for High Performance Acoustic Resonators Huajun LIU Institute of Materials Research and Engineering (IMRE), Agency for Science, Technology and Research (A*STAR)

OR-04-0024-R (Student award nominee)

OR-02-0068 Wafer-Level High-Density Microbump Method for 3D

Invited (20 mins) New Opportunities for MEMS in Silicon Photonics Sangyoon HAN Daegu Gyeongbuk Institute of Science and Technology (DGIST)

OR-04-0057-R Development of Small Size Insects Electroantennogram Device and Its Simple Response Determination Method Yuji SUKEKAWA The University of Tokyo

Lunch Break (12:45-14:00) Oral Session 3 Seminar Room 3 Session Chair: Nicholas Xuanlai FANG Invited (20 mins) High Frequency Acoustomicro uidic Water Splitting for Enhanced Hydrogen Production Leslie YEO RMIT University OR-09-0188 (Student award nominee) Examination of Conditions for Local Anodic Oxidation and Active Layer Polishing for Silicon Nanowire Production Shinya IWASHIRO Ritsumeikan University OR-13-0015-R (Student award nominee) Wearable Motion Capture System Using Stretchable Hybrid Device and Machine Learning Yuji ISANO Yokohama National University Fabrication of an Electric Field Type Gas Grid That Changes The Detection Characteristics of Gas Sensors and Veri cation of Enantiomer Discrimination Manase MIZUTANI Toyohashi University of Technology Lunch Break (12:45 - 14:00) Oral Session 3 Micro/Nano uidics, 3D Printing and Bioprinting II

Integration Chenxi Lin Peking University

OR-02-0126-R Silicon Photonics With Large Mode Field Diameter Using Porous Silicon: A Path Towards Low Coupling and Low Propagation Losses Adrian KEATING The University of Western Australia OR-02-0112 Excellent GeSe Photodetectors with Low Resistance Contact Ruowang CHEN School of Electronics Science and Engineering, Southeast University

OR-02-0065 Transfer-free Direct Laser Patterning of 3D Porous Graphene Structures on a Flexible Substrate Sanghyun LEE Dong-Eui University

OR-05-0013 Rapid Colorimetric Identi cation of Single Nucleotide Polymorphism Coupled with Loop-Mediated Isothermal Ampli cation and Schiff reagent for a Home Test Nae Yoon LEE Gachon University

11:15 - 12:45 14:00 - 15:30

OR-02-0079 Fabrication of Liquid Metal Layer Using Physical Vapor Deposition onto Chloride Treated Surface Ryosuke MATSUDA Yokohama National University

Biological Sensors & Biomedical Devices II

Micro-Optics & Nanophotonics III

MEMS & NEMS II

Piezoelectric Transducers, RF & Acoustics II

UTown Auditorium 1

Seminar Room 1

Seminar Room 7

Global Learning Room

Session Chair: Sangyoon H AN

Session Chair: Xudong WANG

Session Chair: Ming-Chang M. LEE

Session Chair: Huajun LIU

Invited (20 mins) Lab-in-Fab: Accelerating Piezo-MEMS Development in STMicroelectronics Alberto LEOTTI STMicroelectronics

Invited (20 mins) Design, Fabrication and

Keynote (30 mins) MEMS for Large-Scale Ultra-Low-Power Programmable

Keynote (30 mins) Non-Invasive Gas Sensing & Imaging of Blood Volatile Markers for Development of Novel Wearable Biosensors Kohji MITSUBAYASHI Department of Biomedical Devices and Instrumentation, Tokyo Medical and Dental

Applications of Beta Gallium Oxide Nanoelectromechanical Resonators Xuqian ZHENG Nanjing University of Posts and Telecommunication Invited (20 mins) Mechanoionic Effects, Materials, and Sensors Xiong PU Beijing Institute of Nanoenergy and Nanosystems (BINN), Chinese Academy of Sciences (CAS)

Silicon Photonic Circuits Kristinn B. GYLFASON

Micro and Nanosystems, KTH Royal Institute of Technology

University Canceled

Invited (20 mins) Micromachined Acoustic Transducers Based on Piezoelectric Thin Films Yipeng LU Peking University

Invited (20 mins) 3D Printing for Fabricating Micro uidic Devices: from Organ-on-a-chip to Soft Robot Michinao HASHIMOTO Singapore University of Technology and Design (SUTD)

Invited (20 mins) Quantifying Mid-IR Radiation From a Single Nano-Object: Next Generation Thermal Engineering Using Phonon Polaritons Sunmi SHIN National University of Singapore Invited (20 mins) MEMS for Controlling On-Chip Light Propagation Towards Optical Signal Switching and Sensing Applications Mariusz MARTYNIUK The University of Western Australia

Invited (20 mins) Aluminum Scandium Nitride Thin Film Transducers Tao WU ShanghaiTech University

Invited (20 mins) Integrating MEMS and Self-Assembled Electrets Daisuke YAMANE Ritsumeikan University

Invited (20 mins) Multifunctional Additive Manufacturing from 3D to 4D Qi GE Southern University of Science and Technology

OR-05-0025-R Demonstration of The

Identi cation and Dynamics Elucidation of The Bacterium Legionella Using a Filter-Free Wavelength Image Sensor Tomoya IDE Toyohashi University of Technology

OR-05-0034 Cellular Property Characterization Using

OR-11-0134-R Noise Characteristics of Backside Coupled Propagating Surface Plasmon Resonance With Wafer Side Detection

OR-02-0132 Synthesis of Gold Nanotriangles using a Glass Micro uidic Device with Adjusting the Flow Rate Mao HAMAMOTO Materials and Surface Engineering Research Institute, Kanto Gakuin University

OR-09-0074 A Piezoelectric Mechanically Coupled Dual-Disk Resonator With High Q and Good Temperature Stability Longlong LI Wuhan University

OR-03-0103 Design, Fabrication, and Testing of PMUT with Scar-Free Minimally Invasive Surgery Process Yunhao WANG State Key Laboratory of Transducer Technology, Shanghai Institution of Microsystem and Information Technology

Thin-Film-Transistor (TFT) Arrays with Machine Learning Analysis Xingzhuo HU Institute of Industrial Science, The University of Tokyo

Masaaki OSHITA The University of Electro-Communications

(continued...)

16

PROGRAMME

24TH JUNE 2024 (MON) DAY 1

TIME PROGRAMME

OR-04-0197 Overcoupled Metamaterial Absorber for Broadband Molecular Fingerprint Retrieval Dongxiao LI National University of Singapore

OR-02-0149 Additive Manufacturing of A Photothermally Driven Microgripper on An Optical Fiber Tip Shogo OISHI Yokohama National University

OR-01-0178 Parameter Optimization of Delay-Based MEMS Physical Reservoir Computing Zong-Xian GUAN National Yang Ming Chiao Tung University

OR-09-0148 An Ultrasonic Sensor for Material Recognition in Complex Environments Jixuan ZHANG Chongqing University

14:00 - 15:30 16:45 - 18:15

Tea Break (15:30 - 15:45)

Poster Session 1 (15:45 - 16:45)

Oral Session 4

Biological Sensors & Biomedical Devices III

Chemical Sensors I

Wearable Devices & Flexible Electronics II

MEMS & NEMS III

Physical Sensors II

UTown Auditorium 1

Seminar Room 1

Seminar Room 3

Seminar Room 7

Global Learning Room

Oral Session 3

Session Chair: Tie LI

Session Chair: Kazuaki SAWADA

Session Chair: Jongbaeg KIM

Session Chair: Toshiyuki TSUCHIYA

Session Chair: Xueyong WEI

Invited (20 mins) Tear-based Screening of Diabetic Retinopathy by a Detachable Acousto uidic Microchip Han-Sheng CHUANG National Cheng Kung Unviersity Invited (20 mins) Wearable Biosensors for Non-Invasive Monitoring of Human Metabolism Takahiro ARAKAWA Tokyo University of Technology

Keynote (30 mins) Visualization of Gas With 2D LSPR/SERS Plasmonic Sensor Kenshi HAYASHI Department of Electronics, Faculty of Information Science and Electrical Engineering, Kyushu University OR-09-0020 High-Performance Lateral Field Excited AlN Piezoelectric Humidity Sensors Based on Electrospun PVDF/GO and CA/GO Composites Zhenyu WEI Southeast University OR-04-0033-R Capacitive MEMS Hydrogen Sensor with High Gas Selectivity for Exhaled Hydrogen Detection Naoki HIRAMATSU Corporate Research & Development Center, Toshiba Corporation OR-04-0077 Evaluation of Gas Identi cation Performance of UV-Recoverable Gold-Silver-Titanium Oxide LSPR Gas Sensors Shingo KUMAZOE Organic Electronic Device Laboratory, Kyushu University OR-04-0140 High performance Tungsten (VI) Oxide Nano ber for Toxic Gas Sensing Application Jia SONG Nanyang Technological University

Keynote (30 mins) Micro/nano-Enabled

Keynote (30 mins) Leveraging Semiconductor Eco-systems to MEMS Weileun FANG Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University OR-09-0049 Polymethyl Methacrylate (PMMA) Pyrolysis Assisted Transfer of 2D Materials for Large-Scale NEMS Resonator Arrays Rui YANG University of Michigan - Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University OR-09-0159 Investigating Thermal Properties of 2D Non-Layered Material Using a NEMS-Based 2-DOF Approach Jiankai ZHU University of Electronic Science and Technology of China

OR-03-0007 A General Design Strategy and Theorical Model for Enhancing Sensitivity of Flexible Resistive Strain Sensors Shuning CHEN Key Laboratory of MEMS of

Wearable/Flexible Sensors for Smart Healthcare and Medical Applications Inkyu PARK Department of Mechanical Engineering, Korea Advanced OR-03-0010-R Self-Powered Wireless Sensor for Identity Recognition and Morse Code Communication Jiawei SI Key Laboratory of MEMS of Institute of Science & Technology (KAIST)

Ministry of Education, Southeast University

OR-03-0008 Tough, Transparent, Conductive Microphase-Separated Deep Eutectic Hydrogel for Flexible Strain Sensors in Extreme Environments Jiahong KANG Key Laboratory of MEMS of OR-03-0097 Development of ASIC for Eigenmode Separation in Frequency Modulation and Rate Integration Gyroscope Takashiro TSUKAMOTO Tohoku University Ministry of Education, Southeast University

Ministry of Education, Southeast University

Invited (20 mins) Highly Sensitive Micro-Thermometers and its Applications for Cellular Measurements

OR-03-0011 Micropyramid Array Bimodal Electronic Skin for Intelligent Material and Surface Shape

Perception Based on Capacitive Sensing Hongsen NIU Jinan University

Naoki INOMATA Tohoku University

OR-05-0042 Development of a Biosensor Using a Smartphone Camera for Determination of Interleukin-1 α in the Stratum Corneum of the Skin Mao NAITO Meiji University Graduate School OR-05-0043 A Magneto uidic Nucleic Acid Biosensor for Multiplexed Pathogen Detection Nan LI State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences (CAS)

OR-03-0081 A MEMS Tactile Sensor for Mimicking the Time Response of Human Tactile Sensation

OR-10-0064 Impact of non-uniformity in the

OR-03-0023-R High-Performance Water Film Thickness Sensor Based on Microstrip Antenna Guoxin YANG Key Laboratory of MEMS of the

performance of MEMS recon gurable terahertz metasurfaces Vaibhav RANA

Ryusuke MITOBE Niigata University

Institute of Microelectronics (IME), Agency for Science, Technology and Research (A*STAR) OR-09-0175-R Enhancing MEMS Sensor Performance in Ionic Liquids Based on Feedthrough Cancellation Engineering Zhong-Wei LIN Institute of NanoEngineering and MicroSystems, National Tsing Hua University

Ministry of Education, Southeast University

OR-03-0084 Deep-Learning Based Wearable Motion Monitoring Sensor for AR/VR Jiheyon AHN Korea Advanced Institute of Science & Technology (KAIST)

OR-03-0056-R Biaxial Strain Induced Graphene Resonant Mass Sensor Using Elastomer Nanosheet for SARS-CoV-2 Detection Motoki KATO Toyohashi University of Technology OR-03-0100 A High-Performance Vacuum Guage Based on Mode Localization Jiaxin QIN Aerospace Information Research Institute, Chinese Academy of Sciences (CAS)

17

PROGRAMME 25TH JUNE 2024 (TUE)

TIME

PROGRAMME

UTown Auditorium 1 Session Chair: Guangya ZHOU Plenary Speaker, Piezoelectric and Piezoelectret Sensors and Actuators Liwei LIN James Marshall Wells Professor, Department of Mechanical Engineering, Co-Director, Berkeley Sensor and Actuator Center (BSAC), University of California Berkeley

08:45 - 09:45

Oral Session 5

Piezoelectric Transducers, RF & Acoustics III

Wearable Devices & Flexible Electronics III

MEMS & NEMS IV

Micro/Nano uidics, 3D Printing and Bioprinting III

Biological Sensors & Biomedical Devices IV

UTown Auditorium 1

Seminar Room 1

Seminar Room 3

Seminar Room 7

Global Learning Room

Session Chair: Honglong CHANG

Session Chair: Chia-Hung CHEN

Session Chair: Takahiro ARAKAWA

Session Chair: Siddhartha GHOSH

Session Chair: Zhuoqing YANG

OR-05-0070 Development of Wristwatch-Type Multi-Analyte Sweat Monitor Ryoka KAINO Meiji University Graduate School Keynote (30 mins) Soft, Permeable Electronics: Materials and Devices Zijian ZHENG Department of Applied Biology and Chemical Technology, The Hong Kong Polytechnic University

OR-09-0113-R Atomically Thin NEMS Frequency Comb with Both Frequency Tunability and Recon gurability via Multiple Internal Resonances Bo XU University of Electronic Science and Technology of China OR-09-0115 Synergistic Effects of Thermal and Electrostatic Resonance Frequency Tuning in Ultrathin Silicon Nanomechanical Resonators Wei YU Kyoto University Keynote (30 mins) Latent Method for Patterning on Convex and Concave Samples Beyond Diffraction Limit Minoru SASAKI Department of Advanced Science and Technology, Tokyo Technological Institute

OR-05-0180-R Protein Synthesis Using in Vitro Translation and Transcription System Within Monodisperse GUVs Produced by Micro uidics Satoshi NANJO Graduate School of Science and Engineering, Chuo University Keynote (30 mins) Biohybrid Robotics: Integrating Living Materials for Enhanced Robotic Systems Shoji TAKEUCHI Department of Mechano-Informatics, The University of Tokyo

OR-05-0195 DNA Origami-Empowered Surface Plasmon Resonance Biosensor for Ultrasensitive Detection of miRNA Liubing KONG College of Biomedical Engineering and Instrument Science, Zhejiang University Invited (20 mins) Biomimetic Sensors and Their Application in Biomedicine Ping WANG College of Biomedical Engineering and Instrument Science, Zhejiang University

Invited (20 mins) Effects of impurities on piezoelectric AlScN thin lm Shashidhara ACHARYA Institute of Materials Research and Engineering (IMRE), Agency for Science, Technology and Research (A*STAR) Invited (20 mins) Lithium Niobate on Insulator Wideband Surface Acoustic Wave Devices Ming-Huang LI National Tsing Hua University

09:45 - 10:45 11:00 - 12:15

Invited (20 mins) High-Performance Super SAW on Hetero-Integrated Substrate Xin OU Shanghai Institute of Microsystem and Information Technology (SIMIT), Chinese Academy of Sciences (CAS)

OR-07-0078 Large-scale and Paired Particle Trapping and Arraying in Open Micro uidics

OR-05-0089 A Microperfusion System for Effective Cell Culture Using Non-Thermal Atmospheric

Pressure Plasma Hayata OKINO Meijo University

Hiroaki SUSUKI Chuo University

Tea Break (10:45 - 11:00) Oral Session 6

Piezoelectric Transducers, RF & Acoustics IV

Chemical Sensors II

MEMS & NEMS V

Physical Sensors III

Biological Sensors & Biomedical Devices V

UTown Auditorium 1

Seminar Room 1

Seminar Room 3

Seminar Room 7

Global Learning Room

Session Chair: Yipeng LU

Session Chair: Kyoungsik YU

Session Chair: Zenghui WANG

Session Chair: Daisuke YAMANE

Session Chair: Ping WANG

Invited (20 mins) Ideal Antiferroelectricity in Epitaxial PbZrO3 Thin Films for Large Thermal Switching and Electro-Strain Devices Zuhuang CHEN Harbin Institute of Technology

Invited (20 mins) Ef cient Modulation and Broadband Molecular Fingerprint Detection in a Nanostructured Graphene Metamaterial Absorber Xiaojing MU Chongqing University Invited (20 mins) Advanced Piezoelectric Resonant Sensors for Environmental Monitoring Hoe Joon KIM Daegu Gyeongbuk Institute of Science and Technology (DGIST)

Invited (20 mins) Environmental Energy Harvesting and Self-Powered Sensing Applications

OR-03-0109-R MEMS Resonant Pressure Sensor with Double Closed-Loop Control Based on Parametric Pump Wenliang XIA Aerospace Information Research Institute, Chinese Academy of Sciences (CAS) Keynote (30 mins) Sensing with Serial or Parallel Micromechanical Resonators Honglong CHANG School of Mechanical Engineering, Northwestern Polytechnical University

OR-05-0046 Automated Dual-Targeting Blood Exosome-Bounded Amyloid Beta Detection System for Alzheimer's Disease Xiaoxue FAN The University of Hong Kong Keynote (30 mins) Development of Orally Ingestible Devices for Long-Term Monitoring in Rumen Environment Toshihiro ITOH Department of Applied Biology and Chemical Technology, University of Tokyo

Zhuqing WANG Sichuan University

Invited (20 mins) Design and Fabrication of Phononic Integrated Circuits in Scandium Aluminum Nitride Siddhartha GHOSH Northeastern University

Invited (20 mins) Atomically-Thin MoS2 Nanoelectromechanical

Resonators Rui YANG Shanghai Jiao Tong University

(continued...)

18

PROGRAMME

25TH JUNE 2024 (TUE) DAY 2

TIME PROGRAMME

OR-11-0058 Near-Unity Index Meta-surfaces and Super-Blackbody Meta-Surfaces for Effective Absorption of Gas Molecules Joel Yi Yang LOH Department of Electrical and

OR-09-0021-R Nonlinearly Induced

OR-03-0117 A nano-g Fabry Perot

OR-05-0055 Fabrication of Enzyme-Based CMOS Sucrose Image Sensor for Sucrose Visualization in Plants

Invited (20 mins) Challenges of ScAlN-Based Bulk Acoustic Wave Resonators for Over 10 GHz Frequency Chen LIU Institute of Microelectronics (IME), Agency for Science, Technology and Research (A*STAR)

Asymmetric Transmission in Micromechanical Resonators Rui WANG Southeast University

Interferometric Accelerometer with 155-dB Wide Dynamic Range Zongxiang XIE Xi'an Jiaotong University

Yusuke MATSUSHITA Toyohashi University of Technology

Electronics Engineering, University of Manchester

OR-11-0127 Symmetry-Preserving Chiral Metamaterials for Ultrasensitive Detection of Glucose Enantiomers Cheng XU National University of Singapore

OR-10-0153 A Comparative Study on Insertion Loss Spectrum of Acoustic Delay Lines Yang LI ShanghaiTech University

OR-09-0102 Modulating Resonance Mode Sequencing in Nanomechanical Resonators Luming WANG University of Electronic Science and Technology of China

OR-03-0006-R Transparent Laser-Induced Graphene Glass Force Plate for Simultaneous Observation of Object Contact Surfaces Ryo ODA Keio University

OR-05-0201 Label-free hyperspectral imaging of SARS-related coronavirus monolayers via multimodal learning-aided polaronic nanoantennas Hong ZHOU National University of Singapore

11:00 - 12:45

TIME

PROGRAMME

Lunch Break

12:15 - 13:15

Outside Town Plaza Level 2 seminar rooms Poster Session 2

13:15 - 14:15

Social Activities Travel to Cable Car / S.E.A. Aquarium (Please assemble outside Auditorium, level 1 by 14:15) Cable Car / S.E.A. Aquarium Please note that S.E.A. Aquarium closes at 17:00 Please make your way to conference banquet venue before 18:30

14:15 - 15:00

15:00 - 18:30

Conference Banquet Horizon Pavilion, Shangri-La Rasa Sentosa

18:30 - 21:00

19

PROGRAMME 26TH JUNE 2024 (WED)

TIME

PROGRAMME

UTown Auditorium 1 Session Chair: Chengkuo LEE Plenary Speaker, Lanthanide Transducers for Advanced Imaging and Assistive Technology Xiaogang LIU Department of Chemistry, Faculty of Science National University of Singapore

08:45 - 09:45

Oral Session 7

Piezoelectric Transducers, RF & Acoustics V

Biological Sensors & Biomedical Devices VI

Wearable Devices & Flexible Electronics IV

MEMS & NEMS VI

UTown Auditorium 1

Seminar Room 1

Seminar Room 3

Global Learning Room

Session Chair: Yao ZHU Keynote (30 mins) Commercializing MEMS-Based Ultrasound David HORSLEY

Session Chair: Changsheng WU

Session Chair: Yi CHIU

OR-10-0143 Tunable MEMS Oscillators for Sensing and Computation Applications Yuan-Chieh LEE National Yang Ming Chiao Tung University OR-03-0009 From Energy Harvesting to Acceleration Key Laboratory of MEMS of Ministry of Education, Southeast University, China OR-03-0014-R Passive Multi-Parameter Sensing Platform Enabled by SAWR Kai WANG Southeast University OR-01-0050-R Design of a Low Voltage MEMS XY Stage for High Performance Image Stabilization Ilgar Jafarsadeghi POURNAKI University of New South Wales, Sydney OR-09-0170-R Exceptional points enhance sensing in silicon micromechanical accelerometer Shangyang ZHANG Key Laboratory of MEMS of Ministry of Education,Southeast University Session Chair: Guangya ZHOU Sensing: The Versatile Role of PVDF-Based Nanogenerators in Advanced Sensor Technologies Bozhi WU

OR-05-0104 Proposal of Localized Immobilization Technique for Bioreceptors on Optical Interferometric MEMS Biosensor Using Functionalized Electrolytic Polymer Film Masaki OSHINO Toyohashi University of Technology Keynote (30 mins) Digital Methods for Micro Bio Systems Satoshi KONISHI Department of Mechanical Engineering, College of Science and Engineering, Ritsumeikan University

Invited (20 mins) Superhuman Fingertip Sensing Realized by High-Resolution Silicon MEMS Tactile Sensors Hidekuni TAKAO Kagawa University

Department of Electrical & Computer Engineering, College of Engineering, Northeastern University Keynote (30 mins) GHz Ultrasonics Microsystems for Imaging and Computation Amit LAL Department of Electrical and Computer Engineering, Cornell University OR-03-0075 Exploring Dual Sensing Mechanisms: Unraveling Triboelectric Energy Routes in Piezoelectric Barium Titanate (BTO)/P(VDF-TrFE) Nanocomposites Nadeem Tariq BEIGH Nanyang Technological University

Canceled

OR-05-0141 Application of Current Detection Surface Plasmon Resonance Sensor Using

OR-09-0146 Wearable Stethoscope for Real-Time Monitoring of Physiological Data of Exercise-Individual Tao LIU Chongqing University OR-16-0052 Highly Sensitive Wireless Temperature Sensors Based on Nonlinear Parity-Time Symmetry Dongyan CHEN Key Laboratory of MEMS of the Ministry of Education, School of Integrated Circuits, Southeast University

09:45 - 11:00 11:15 - 12:4

Silicon and Gold Grating for Biomolecular Measurement Yuki IMAI The University of Electro-Communications

OR-06-0094 Searching for Stiffness Singularity Using Directional Palpation by a Micro nger and Its Scanning Condition Dependence Yuto HORI Ritsumeikan University

Tea Break (11:00 - 11:15) Oral Session 8

Piezoelectric Transducers, RF & Acoustics VI

Micro/Nano uidics, 3D Printing and Bioprinting IV

Micro-Optics & Nanophotonics IV

Micro/Nanofabrication, Materials & Packaging II

UTown Auditorium 1

Seminar Room 1

Seminar Room 3

Global Learning Room

Session Chair: Tao WU

Session Chair: Machimao HASHIMOTO

Session Chair: Adrian KEATING

Session Chair: King-Ho Holden LI

Keynote (30 mins) AlScN RF Microacoustic Resonators and Filters for Future 5G and 6G Cellular Radios Matteo RINALDI Institute for NanoSystems Innovation, Northeastern University Keynote (30 mins) Advancing the Frontier of ScAlN RF Acoustic Technology Yao ZHU Institute of Microelectronics (IME), Agency for Science, Technology and Research (A*STAR) Invited (20 mins) Post Processing Strategy for Boosting the Cantilever Type Piezoelectric MEMS Speaker Performance Hongbin YU Huazhong University of Science and Technology

Invited (20 mins) Microphysiological Systems for Disease Modeling and Drug Testing Jessie Sungyun JEON Korea Advanced Institute of Science & Technology (KAIST) Invited (20 mins) Micropatterned Liquid Metal in Elastomers for Conformal Transducers in Human Body Xingyu JIANG Southern University of Science and Technology Invited (20 mins) Hydrogel-Based Sealed Microwell Array for Analyzing Exosomes Secreted Single Cells

Invited (20 mins) Silicon-Based Sub-Bandgap Near-Infrared Photodetection Kyoungsik YU Korean Advanced Institute of Science and Technology (KAIST) Invited (20 mins) Liquid Lens and Its Application in Imaging System Lei LI Sichuan University Invited (20 mins) CMOS-Compatible Aluminum Nitride Integrated Photonics Platform Nanxi LI Institute of Microelectronics (IME), Agency for Science, Technology and Research (A*STAR)

Canaceled

Invited (20 mins) Silicon Migration Seal (SMS) Wafer-Level Packaging Technology for Resonant MEMS Yukio SUZUKI Tohoku University OR-05-0121 Consistency Improved Silicon Nanowire FET Biosensor with Optical Calibration Strategy Yanzhi DOU Shanghai Institute of Microsystem and Information Technology

Hiroaki ONOE Keio University

(continued...)

20

Made with FlippingBook Learn more on our blog