APCOT2024 Programme Booklet

PROGRAMME

24TH JUNE 2024 (MON) DAY 1

TIME PROGRAMME

Invited (20 mins) Piezoelectric Silicon-on-Nothing Process: Versatile Process Platform for MEMS Acoustic Devices Yul KOH Institute of Microelectronics (IME), Agency for Science, Technology and Research (A*STAR) Invited (20 mins) Next Generation Piezoelectric Thin Films for High Performance Acoustic Resonators Huajun LIU Institute of Materials Research and Engineering (IMRE), Agency for Science, Technology and Research (A*STAR)

OR-04-0024-R (Student award nominee)

OR-02-0068 Wafer-Level High-Density Microbump Method for 3D

Invited (20 mins) New Opportunities for MEMS in Silicon Photonics Sangyoon HAN Daegu Gyeongbuk Institute of Science and Technology (DGIST)

OR-04-0057-R Development of Small Size Insects Electroantennogram Device and Its Simple Response Determination Method Yuji SUKEKAWA The University of Tokyo

Lunch Break (12:45-14:00) Oral Session 3 Seminar Room 3 Session Chair: Nicholas Xuanlai FANG Invited (20 mins) High Frequency Acoustomicro uidic Water Splitting for Enhanced Hydrogen Production Leslie YEO RMIT University OR-09-0188 (Student award nominee) Examination of Conditions for Local Anodic Oxidation and Active Layer Polishing for Silicon Nanowire Production Shinya IWASHIRO Ritsumeikan University OR-13-0015-R (Student award nominee) Wearable Motion Capture System Using Stretchable Hybrid Device and Machine Learning Yuji ISANO Yokohama National University Fabrication of an Electric Field Type Gas Grid That Changes The Detection Characteristics of Gas Sensors and Veri cation of Enantiomer Discrimination Manase MIZUTANI Toyohashi University of Technology Lunch Break (12:45 - 14:00) Oral Session 3 Micro/Nano uidics, 3D Printing and Bioprinting II

Integration Chenxi Lin Peking University

OR-02-0126-R Silicon Photonics With Large Mode Field Diameter Using Porous Silicon: A Path Towards Low Coupling and Low Propagation Losses Adrian KEATING The University of Western Australia OR-02-0112 Excellent GeSe Photodetectors with Low Resistance Contact Ruowang CHEN School of Electronics Science and Engineering, Southeast University

OR-02-0065 Transfer-free Direct Laser Patterning of 3D Porous Graphene Structures on a Flexible Substrate Sanghyun LEE Dong-Eui University

OR-05-0013 Rapid Colorimetric Identi cation of Single Nucleotide Polymorphism Coupled with Loop-Mediated Isothermal Ampli cation and Schiff reagent for a Home Test Nae Yoon LEE Gachon University

11:15 - 12:45 14:00 - 15:30

OR-02-0079 Fabrication of Liquid Metal Layer Using Physical Vapor Deposition onto Chloride Treated Surface Ryosuke MATSUDA Yokohama National University

Biological Sensors & Biomedical Devices II

Micro-Optics & Nanophotonics III

MEMS & NEMS II

Piezoelectric Transducers, RF & Acoustics II

UTown Auditorium 1

Seminar Room 1

Seminar Room 7

Global Learning Room

Session Chair: Sangyoon H AN

Session Chair: Xudong WANG

Session Chair: Ming-Chang M. LEE

Session Chair: Huajun LIU

Invited (20 mins) Lab-in-Fab: Accelerating Piezo-MEMS Development in STMicroelectronics Alberto LEOTTI STMicroelectronics

Invited (20 mins) Design, Fabrication and

Keynote (30 mins) MEMS for Large-Scale Ultra-Low-Power Programmable

Keynote (30 mins) Non-Invasive Gas Sensing & Imaging of Blood Volatile Markers for Development of Novel Wearable Biosensors Kohji MITSUBAYASHI Department of Biomedical Devices and Instrumentation, Tokyo Medical and Dental

Applications of Beta Gallium Oxide Nanoelectromechanical Resonators Xuqian ZHENG Nanjing University of Posts and Telecommunication Invited (20 mins) Mechanoionic Effects, Materials, and Sensors Xiong PU Beijing Institute of Nanoenergy and Nanosystems (BINN), Chinese Academy of Sciences (CAS)

Silicon Photonic Circuits Kristinn B. GYLFASON

Micro and Nanosystems, KTH Royal Institute of Technology

University Canceled

Invited (20 mins) Micromachined Acoustic Transducers Based on Piezoelectric Thin Films Yipeng LU Peking University

Invited (20 mins) 3D Printing for Fabricating Micro uidic Devices: from Organ-on-a-chip to Soft Robot Michinao HASHIMOTO Singapore University of Technology and Design (SUTD)

Invited (20 mins) Quantifying Mid-IR Radiation From a Single Nano-Object: Next Generation Thermal Engineering Using Phonon Polaritons Sunmi SHIN National University of Singapore Invited (20 mins) MEMS for Controlling On-Chip Light Propagation Towards Optical Signal Switching and Sensing Applications Mariusz MARTYNIUK The University of Western Australia

Invited (20 mins) Aluminum Scandium Nitride Thin Film Transducers Tao WU ShanghaiTech University

Invited (20 mins) Integrating MEMS and Self-Assembled Electrets Daisuke YAMANE Ritsumeikan University

Invited (20 mins) Multifunctional Additive Manufacturing from 3D to 4D Qi GE Southern University of Science and Technology

OR-05-0025-R Demonstration of The

Identi cation and Dynamics Elucidation of The Bacterium Legionella Using a Filter-Free Wavelength Image Sensor Tomoya IDE Toyohashi University of Technology

OR-05-0034 Cellular Property Characterization Using

OR-11-0134-R Noise Characteristics of Backside Coupled Propagating Surface Plasmon Resonance With Wafer Side Detection

OR-02-0132 Synthesis of Gold Nanotriangles using a Glass Micro uidic Device with Adjusting the Flow Rate Mao HAMAMOTO Materials and Surface Engineering Research Institute, Kanto Gakuin University

OR-09-0074 A Piezoelectric Mechanically Coupled Dual-Disk Resonator With High Q and Good Temperature Stability Longlong LI Wuhan University

OR-03-0103 Design, Fabrication, and Testing of PMUT with Scar-Free Minimally Invasive Surgery Process Yunhao WANG State Key Laboratory of Transducer Technology, Shanghai Institution of Microsystem and Information Technology

Thin-Film-Transistor (TFT) Arrays with Machine Learning Analysis Xingzhuo HU Institute of Industrial Science, The University of Tokyo

Masaaki OSHITA The University of Electro-Communications

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